The structural characteristics of Ga2O3 nanowires and the sensitivity of Ga2O3 extended gate field effect transistor (EGFET) pH sensors are investigated. The Ga2O3 nanowires are prepared using a vapor-liquid-solid (VLS) mechanism. The results show that the nanowires correspond to β-Ga2O3 phase and single crystals. The β-Ga2O3 nanowires were active materials in the EGFET pH sensor. The resulting EGFET pH sensor containing β-Ga2O3 nanowires exhibits high detection of properties (14 μA · pH-1). The β-Ga2O3 nanowires are a candidate material for pH sensor.
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