Channel width dependence of hot-carrier induced degradation in shallow trench isolated pMOSFETs

Kazunari Ishimaru, Jone F. Chen, Chenming Hu

研究成果: Conference contribution

摘要

Channel width dependence of hotcarrier induced degradation in pMOSFETs with shallow trench isolation structure is investigated. Enhanced degradation is observed in narrow channel width device due to the increase in the electron trapping efficiency of the gate oxide film. Mechanical stress may be responsible for this phenomenon.

原文English
主出版物標題ESSDERC 1998 - Proceedings of the 28th European Solid-State Device Research Conference
編輯A. Touboul, Y. Danto, H. Grunbacher
發行者IEEE Computer Society
頁面240-243
頁數4
ISBN(電子)2863322346
出版狀態Published - 1998
事件28th European Solid-State Device Research Conference, ESSDERC 1998 - Bordeaux, France
持續時間: 1998 9月 81998 9月 10

出版系列

名字European Solid-State Device Research Conference
ISSN(列印)1930-8876

Other

Other28th European Solid-State Device Research Conference, ESSDERC 1998
國家/地區France
城市Bordeaux
期間98-09-0898-09-10

All Science Journal Classification (ASJC) codes

  • 電氣與電子工程
  • 安全、風險、可靠性和品質

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