Characteristics of a Pt/NiO thin film-based ammonia gas sensor

Huey Ing Chen, Cheng Yu Hsiao, Wei Cheng Chen, Ching Hong Chang, Tzu Chieh Chou, I. Ping Liu, Kun Wei Lin, Wen Chau Liu

研究成果: Article

26 引文 (Scopus)

摘要

The sensing characteristics of a Pt/NiO thin film-based resistor-type ammonia gas sensor are comprehensively studied and demonstrated. Experimentally, the studied Pt/NiO ammonia gas sensor exhibits improved performance, including a higher sensing response of ratio of 1278%, an extremely low detection limit of 10 ppb NH3/air, and fast speeds, at an optimal operating temperature of 300 °C. Based on the advantages indicated above and the benefits of its simple structure, relatively easy fabrication, and inherent p-type semiconductor properties, the studied device is promising for high-performance ammonia gas sensing and complementary metal oxide sensor (CMOS) array applications.

原文English
頁(從 - 到)962-967
頁數6
期刊Sensors and Actuators, B: Chemical
256
DOIs
出版狀態Published - 2018 三月

指紋

Chemical sensors
Ammonia
ammonia
Thin films
sensors
thin films
gases
Sensor arrays
Resistors
Oxides
p-type semiconductors
Gases
Metals
operating temperature
resistors
Semiconductor materials
metal oxides
Fabrication
Air
fabrication

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

引用此文

Chen, Huey Ing ; Hsiao, Cheng Yu ; Chen, Wei Cheng ; Chang, Ching Hong ; Chou, Tzu Chieh ; Liu, I. Ping ; Lin, Kun Wei ; Liu, Wen Chau. / Characteristics of a Pt/NiO thin film-based ammonia gas sensor. 於: Sensors and Actuators, B: Chemical. 2018 ; 卷 256. 頁 962-967.
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Characteristics of a Pt/NiO thin film-based ammonia gas sensor. / Chen, Huey Ing; Hsiao, Cheng Yu; Chen, Wei Cheng; Chang, Ching Hong; Chou, Tzu Chieh; Liu, I. Ping; Lin, Kun Wei; Liu, Wen Chau.

於: Sensors and Actuators, B: Chemical, 卷 256, 03.2018, p. 962-967.

研究成果: Article

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AU - Hsiao, Cheng Yu

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AU - Liu, Wen Chau

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