Characteristics of the plume particles removed by a swirling flow nozzle in laser ablation

Der Ying Tsai, Jehnming Lin

研究成果: Article同行評審

10 引文 斯高帕斯(Scopus)

摘要

The plume particles removed by a swirling flow nozzle in laser ablation have been characterized with numerical and experimental approaches in this paper. The swirling flow was simulated by a computational fluid dynamic (CFD) software with RNG k - ε turbulent model. The air flow passed through a specifically designed swirling flow nozzle and impinged on the substrate with various inlet velocities. The trajectories of the plume particles with various diameters in the flow field were calculated and compared with the flow visualization in the experiments. The results show that the velocity distribution of the swirling flow on the substrate was significantly affected by the swirling strength of the flow. It shows that the plasma plume was removed efficiently and the surface roughness was significantly reduced by the implementation of swirling flow in laser ablation.

原文English
頁(從 - 到)219-224
頁數6
期刊Optics and Laser Technology
39
發行號1
DOIs
出版狀態Published - 2007 2月

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料
  • 原子與分子物理與光學
  • 電氣與電子工程

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