@inproceedings{f6b73a2bdb12485ca6c0fdbadb0b8322,
title = "Characteristics of TiO2 metal-semiconductor-metal photodetectors with O2 plasma treatment",
abstract = "In this study, titanium dioxide (TiO2) films were prepared on Corning glass substrates by radio frequency (RF) magnetron sputtering and treated without and with O2 plasma conditions, and then were used to fabricate metal-semiconductor-metal (MSM) ultraviolet (UV) photodetectors (PDs). The effects of the changes on TiO2 films were investigated by using field-emission scanning electron microscope (FE-SEM), photoluminescence (PL) system and four-point probe measurement. With a 360-nm illumination and 5 V applied bias, it was found that the responsivities of the fabricated TiO2 PDs without and with 2 minutes O2 plasma treatment were 36 and 153 A/W, respectively.",
author = "Ji, {L. W.} and Tang, {I. T.} and Young, {S. J.} and Meen, {T. H.} and Tsai, {J. K.} and Wu, {T. C.} and Chang, {S. J.} and Luo, {Y. P.} and Lee, {K. C.} and Lin, {J. C.} and Lee, {B. Y.}",
note = "Publisher Copyright: {\textcopyright} 2014 IEEE.; 2014 International Conference on Information Science, Electronics and Electrical Engineering, ISEEE 2014 ; Conference date: 26-04-2014 Through 28-04-2014",
year = "2014",
month = nov,
day = "5",
doi = "10.1109/InfoSEEE.2014.6948069",
language = "English",
series = "Proceedings - 2014 International Conference on Information Science, Electronics and Electrical Engineering, ISEEE 2014",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "63--66",
editor = "Xiaohong Jiang and Shaozi Li and Ying Dai and Yun Cheng",
booktitle = "Proceedings - 2014 International Conference on Information Science, Electronics and Electrical Engineering, ISEEE 2014",
address = "United States",
}