TY - JOUR
T1 - Characteristics of transparent conductive Al-doped ZnO and Ag-Ti tri-layer thin films prepared by multi-target magnetron sputtering
AU - Shih, W. C.
AU - Kao, K. S.
AU - Cheng, D. L.
AU - Chung, C. J.
AU - Hsieh, P. T.
AU - Ou, S. L.
N1 - Funding Information:
This work was supported by the National Science Council, Taiwan, R.O.C. under contract no. NSC 100-2221-E-366-007 .
PY - 2013/3/25
Y1 - 2013/3/25
N2 - Al-doped ZnO (AZO) and Ag-Ti films were successfully deposited on glass substrates by multi-target magnetron sputtering to form the high transparent AZO/Ag-Ti/AZO multilayer. The optical, electrical properties and lifetime performance were investigated at various AZO and Ag-Ti thicknesses. As the AZO thickness was fixed at 10nm and Ag-Ti thickness was varied between 6 and 22nm, it can be found that AZO10nm/Ag-Ti10nm/AZO10nm possessed good conductivity and highest transmittance in visible region. Then an AZO thickness adjustment of 10-90nm was performed. With increasing AZO thickness from 10 to 70nm, the transmittances of AZO10-70nm/Ag-Ti10nm/AZO10-70nm films were all above 80% in the visible region and optimal transparency can be reached at AZO thickness of 70nm. Although the conductivity in AZO/Ag-Ti/AZO films was decreased with increasing Ag-Ti thickness, the resistivity of 4.95×10-4Ω-cm in AZO70nm/Ag-Ti10nm/AZO70nm was still acceptable. From the lifetime tests under normal circumstance, these multilayers almost showed the same transmittance and resistivity from 0 to 90days. Furthermore, the AZO70nm/Ag-Ti10nm/AZO70nm exhibits the highest figure of merit of 8.93×10-3Ω-1, indicating that the multilayer has high potential in optoelectronic applications.
AB - Al-doped ZnO (AZO) and Ag-Ti films were successfully deposited on glass substrates by multi-target magnetron sputtering to form the high transparent AZO/Ag-Ti/AZO multilayer. The optical, electrical properties and lifetime performance were investigated at various AZO and Ag-Ti thicknesses. As the AZO thickness was fixed at 10nm and Ag-Ti thickness was varied between 6 and 22nm, it can be found that AZO10nm/Ag-Ti10nm/AZO10nm possessed good conductivity and highest transmittance in visible region. Then an AZO thickness adjustment of 10-90nm was performed. With increasing AZO thickness from 10 to 70nm, the transmittances of AZO10-70nm/Ag-Ti10nm/AZO10-70nm films were all above 80% in the visible region and optimal transparency can be reached at AZO thickness of 70nm. Although the conductivity in AZO/Ag-Ti/AZO films was decreased with increasing Ag-Ti thickness, the resistivity of 4.95×10-4Ω-cm in AZO70nm/Ag-Ti10nm/AZO70nm was still acceptable. From the lifetime tests under normal circumstance, these multilayers almost showed the same transmittance and resistivity from 0 to 90days. Furthermore, the AZO70nm/Ag-Ti10nm/AZO70nm exhibits the highest figure of merit of 8.93×10-3Ω-1, indicating that the multilayer has high potential in optoelectronic applications.
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U2 - 10.1016/j.surfcoat.2013.01.017
DO - 10.1016/j.surfcoat.2013.01.017
M3 - Article
AN - SCOPUS:84875254254
SN - 0257-8972
VL - 219
SP - 139
EP - 143
JO - Surface and Coatings Technology
JF - Surface and Coatings Technology
ER -