Characteristics of zinc oxide deposited on copper metallized Si substrates

Y. S. Chang, Jyh-Ming Ting

研究成果: Article


A radio frequency sputter deposition technique was used to deposit ZnO on Si specimens with surface metallization of copper. An ion beam sputter deposition technique was employed for the copper metallization. Crystalline sizes of ZnO thin films were found to be sensitive to the deposition temperature and insensitive to the O2/Ar ratio.

頁(從 - 到)2142-2148
期刊Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
出版狀態Published - 2001 九月 1

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

指紋 深入研究「Characteristics of zinc oxide deposited on copper metallized Si substrates」主題。共同形成了獨特的指紋。

  • 引用此