Characteristics of zinc oxide deposited on copper metallized Si substrates

Y. S. Chang, Jyh-Ming Ting

研究成果: Article

摘要

A radio frequency sputter deposition technique was used to deposit ZnO on Si specimens with surface metallization of copper. An ion beam sputter deposition technique was employed for the copper metallization. Crystalline sizes of ZnO thin films were found to be sensitive to the deposition temperature and insensitive to the O2/Ar ratio.

原文English
頁(從 - 到)2142-2148
頁數7
期刊Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
19
發行號5
DOIs
出版狀態Published - 2001 九月 1

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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