Graphene is a two-dimensional material which is composed of a honeycomb lattice made of single atomic layer of carbon atoms arranged in a hexagonal atomic structure. It has many extraordinary properties desirable for real-world applications. Low electrical resistivity, high electromigration resistance, high thermal conductivity, and outstanding mechanical strength make graphene a promising candidate for nano-interconnects. The atomically thin graphene is also optically transparent in a wide spectrum of wavelength and an excellent diffusion barrier. In this chapter, characterization of graphene for electronic, electrical, optical, and mechanical applications is discussed.
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