Characterization of Nb-doped MgZnO films grown by a radio-frequency magnetron sputtering system

Kuang Po Hsueh, Wen Yen Lin, Hsien Chin Chiu, Hsiang Chun Wang, Jinn Kong Sheu, Yu Hsiang Yeh

研究成果: Conference contribution

摘要

Niobium-doped MgxZn1-xO (Nb-MZO) mixed oxide films with high transmittance were successfully deposited on sapphire substrates by a radio-frequency (RF) magnetron sputtering using a 4-in ZnO/MgO/NbOx (75/20/5 wt %) target. In this study, the films were analyzed through a Hall test, X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), and transmittance. The XRD results showed MgO2 (002) wurtzite peak as well as an MgxZn1-xO (111)-cubic peak. The absorption edges of these Nb-MZO films were located in the UV region, implying that the MgO content of the Nb-MZO layer increased the bandgaps. The XPS spectra of Nb-MZO films were also used to analyze the composition of the as-grown and annealed Nb-MZO films. These results indicate that the Nb-MZO films are ideal for use as transparent contact layers.

原文English
主出版物標題IBP 2015 - 2015 IEEE International Broadband and Photonics Conference
發行者Institute of Electrical and Electronics Engineers Inc.
頁面55-59
頁數5
ISBN(電子)9781479984756
DOIs
出版狀態Published - 2015 八月 31
事件IEEE International Broadband and Photonics Conference, IBP 2015 - Bali, Indonesia
持續時間: 2015 四月 232015 四月 25

出版系列

名字IBP 2015 - 2015 IEEE International Broadband and Photonics Conference

Other

OtherIEEE International Broadband and Photonics Conference, IBP 2015
國家Indonesia
城市Bali
期間15-04-2315-04-25

All Science Journal Classification (ASJC) codes

  • Computer Networks and Communications
  • Signal Processing
  • Electrical and Electronic Engineering
  • Atomic and Molecular Physics, and Optics
  • Communication

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    Hsueh, K. P., Lin, W. Y., Chiu, H. C., Wang, H. C., Sheu, J. K., & Yeh, Y. H. (2015). Characterization of Nb-doped MgZnO films grown by a radio-frequency magnetron sputtering system. 於 IBP 2015 - 2015 IEEE International Broadband and Photonics Conference (頁 55-59). [7230765] (IBP 2015 - 2015 IEEE International Broadband and Photonics Conference). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IBP.2015.7230765