Characterization of oxide tarps in 28nm p-type metal-oxide-semiconductor field-effect transistors with tip-shaped SiGe source/drain based on random telegraph noise

Bo Chin Wang, San Lein Wu, Chien Wei Huang, Yu Ying Lu, Shoou Jinn Chang, Yu Min Lin, Kun Hsien Lee, Osbert Cheng

研究成果: Article同行評審

14 引文 斯高帕斯(Scopus)

指紋

深入研究「Characterization of oxide tarps in 28nm p-type metal-oxide-semiconductor field-effect transistors with tip-shaped SiGe source/drain based on random telegraph noise」主題。共同形成了獨特的指紋。

Physics & Astronomy

Engineering & Materials Science