ZnO metal-semiconductor-metal (MSM) photodiodes with palladium (Pd) contact electrodes were fabricated. It was found that the barrier height at the Pd/ZnO interface was 0.701 eV. With an incident wavelength of 370 nm and 1 V applied bias, it was found that the maximum responsivity of the Pd/ZnO/Pd MSM photodiodes was 0.051 A/W, which corresponds to a quantum efficiency of 11.4%. For a given bandwidth of 100 Hz and 1 V applied bias, we found that the noise equivalent power and the corresponding detectivity D* were 1.13 × 10-12 W and 6.25 × 1011 cmHz0.5 W -1, respectively.
All Science Journal Classification (ASJC) codes