Poly-crysial ZnO films with c-axis (002) orientation have been successfully grown on the 64° LiNbO3 substrate by RF magnetron sputtering technique. The deposited films were characterized as a function of deposition temperature, argon-oxygen gas flow ratio and the chamber pressure. Crystalline structures of the films were investigated by X-ray diffraction (XRD) and scanning electron microscopy (SEM) observations. Highly (002) oriented films can be obtained. Love wave devices based on this structure (ZnO/IDTs/64° LiNbO3) were then presented. Preferred deposition condition was found to give good film quality for resonator filter and sensor applications, respectively.
|頁（從 - 到）||55-63|
|出版狀態||Published - 2005|
|事件||16th International Symposium on Integrated Ferroelectrics, ISIF-16 - Gyeongju, Korea, Republic of|
持續時間: 2004 4月 5 → 2004 4月 8
All Science Journal Classification (ASJC) codes