TY - JOUR
T1 - Characterization of ZnO thin film depositing on the 64° LiNbO 3 substrate and its applications on liquid sensors
AU - Jian, Shiou Jen
AU - Chu, Sheng Yuan
PY - 2005
Y1 - 2005
N2 - Poly-crysial ZnO films with c-axis (002) orientation have been successfully grown on the 64° LiNbO3 substrate by RF magnetron sputtering technique. The deposited films were characterized as a function of deposition temperature, argon-oxygen gas flow ratio and the chamber pressure. Crystalline structures of the films were investigated by X-ray diffraction (XRD) and scanning electron microscopy (SEM) observations. Highly (002) oriented films can be obtained. Love wave devices based on this structure (ZnO/IDTs/64° LiNbO3) were then presented. Preferred deposition condition was found to give good film quality for resonator filter and sensor applications, respectively.
AB - Poly-crysial ZnO films with c-axis (002) orientation have been successfully grown on the 64° LiNbO3 substrate by RF magnetron sputtering technique. The deposited films were characterized as a function of deposition temperature, argon-oxygen gas flow ratio and the chamber pressure. Crystalline structures of the films were investigated by X-ray diffraction (XRD) and scanning electron microscopy (SEM) observations. Highly (002) oriented films can be obtained. Love wave devices based on this structure (ZnO/IDTs/64° LiNbO3) were then presented. Preferred deposition condition was found to give good film quality for resonator filter and sensor applications, respectively.
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U2 - 10.1080/10584580590897272
DO - 10.1080/10584580590897272
M3 - Conference article
AN - SCOPUS:33644758208
SN - 1058-4587
VL - 69
SP - 55
EP - 63
JO - Integrated Ferroelectrics
JF - Integrated Ferroelectrics
T2 - 16th International Symposium on Integrated Ferroelectrics, ISIF-16
Y2 - 5 April 2004 through 8 April 2004
ER -