Chemical oxide interfacial layer for the high-k-last/gate-last integration scheme
Ying Tsung Chen, Ssu I. Fu, Wen Tai Chiang, Chien Ting Lin, Shih Hung Tsai, Shao Wei Wang, Shoou Jinn Chang
研究成果: Article › 同行評審
9
引文
斯高帕斯（Scopus）