TY - JOUR
T1 - Commercial aspects of epitaxial thin film growth in outer space
AU - Ignatiev, Alex
AU - Chu, C. W.
N1 - Copyright:
Copyright 2004 Elsevier B.V., All rights reserved.
PY - 1988
Y1 - 1988
N2 - A new concept for materials processing in space exploits the ultra vacuum component of space for thin film epitaxial growth. The unique low earth orbit space environment is expected to yield 10-14 torr of better pressures, semi-infinite pumping speeds and large ultra vacuum volume (approx. 100 m3) without walls. These space ultra vacuum properties promise major improvement in the quality, unique nature, and the throughput of epitaxially grown materials especially in the area of semiconductors for microelectronics use. For such thin film materials there is expected a very large value added from space ultra vacuum processing, and as a result the application of the epitaxial thin film growth technology to space could lead to major commercial efforts in space.
AB - A new concept for materials processing in space exploits the ultra vacuum component of space for thin film epitaxial growth. The unique low earth orbit space environment is expected to yield 10-14 torr of better pressures, semi-infinite pumping speeds and large ultra vacuum volume (approx. 100 m3) without walls. These space ultra vacuum properties promise major improvement in the quality, unique nature, and the throughput of epitaxially grown materials especially in the area of semiconductors for microelectronics use. For such thin film materials there is expected a very large value added from space ultra vacuum processing, and as a result the application of the epitaxial thin film growth technology to space could lead to major commercial efforts in space.
UR - http://www.scopus.com/inward/record.url?scp=0024127336&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0024127336&partnerID=8YFLogxK
M3 - Conference article
AN - SCOPUS:0024127336
SN - 0584-6099
SP - 1.11-1.21
JO - Space Congress Proceedings
JF - Space Congress Proceedings
T2 - Twenty-Fifth Space Congress, Proceedings: Heritage, Dedication, Vision
Y2 - 26 April 1988 through 29 April 1988
ER -