Commercial aspects of epitaxial thin film growth in outer space

Alex Ignatiev, C. W. Chu

研究成果: Conference article同行評審

摘要

A new concept for materials processing in space exploits the ultra vacuum component of space for thin film epitaxial growth. The unique low earth orbit space environment is expected to yield 10-14 torr of better pressures, semi-infinite pumping speeds and large ultra vacuum volume (approx. 100 m3) without walls. These space ultra vacuum properties promise major improvement in the quality, unique nature, and the throughput of epitaxially grown materials especially in the area of semiconductors for microelectronics use. For such thin film materials there is expected a very large value added from space ultra vacuum processing, and as a result the application of the epitaxial thin film growth technology to space could lead to major commercial efforts in space.

原文English
頁(從 - 到)1.11-1.21
期刊Space Congress Proceedings
出版狀態Published - 1988
事件Twenty-Fifth Space Congress, Proceedings: Heritage, Dedication, Vision - Cocoa Beach, FL, USA
持續時間: 1988 四月 261988 四月 29

All Science Journal Classification (ASJC) codes

  • 航空工程

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