TY - JOUR
T1 - Computationally efficient compact model for ferroelectric field-effect transistors to simulate the online training of neural networks
AU - Lu, Darsen Duane
AU - De, Sourav
AU - Baig, Mohammed Aftab
AU - Qiu, Bo Han
AU - Lee, Yao Jen
N1 - Publisher Copyright:
© 2020 IOP Publishing Ltd.
PY - 2020/9
Y1 - 2020/9
N2 - In this paper, a compact drain current formulation that is simple and adequately computationally efficient for the simulation of neural network online training was developed for the ferroelectric memory transistor. Tri-gate ferroelectric field-effect transistors (FETs) with Hf0.5Zr0.5O2 gate insulators were fabricated with a gate-first high-k metal gate CMOS process. Ferroelectric switching was confirmed with double sweep and pulse programming and erasure measurements. Novel characterization scheme for drain current was proposed with minimal alteration of ferroelectric state in subthreshold for accurate threshold voltage measurements. The resultant threshold voltage exhibited highly linear and symmetric across multilevel states. The proposed compact formulation accurately captured the FET gate-bias dependence by considering the effects of series resistance, Coulomb scattering, and vertical field dependent mobility degradation.
AB - In this paper, a compact drain current formulation that is simple and adequately computationally efficient for the simulation of neural network online training was developed for the ferroelectric memory transistor. Tri-gate ferroelectric field-effect transistors (FETs) with Hf0.5Zr0.5O2 gate insulators were fabricated with a gate-first high-k metal gate CMOS process. Ferroelectric switching was confirmed with double sweep and pulse programming and erasure measurements. Novel characterization scheme for drain current was proposed with minimal alteration of ferroelectric state in subthreshold for accurate threshold voltage measurements. The resultant threshold voltage exhibited highly linear and symmetric across multilevel states. The proposed compact formulation accurately captured the FET gate-bias dependence by considering the effects of series resistance, Coulomb scattering, and vertical field dependent mobility degradation.
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U2 - 10.1088/1361-6641/ab9bed
DO - 10.1088/1361-6641/ab9bed
M3 - Article
AN - SCOPUS:85089183999
SN - 0268-1242
VL - 35
JO - Semiconductor Science and Technology
JF - Semiconductor Science and Technology
IS - 9
M1 - 095007
ER -