Continuum-based multi-physical analysis and fabrication experiment of laser-assisted direct imprinting

Di Bao Wang, Yung Chun Lee, Fei Bin Hsiao, Jun Yi Ruan, Ming Hung Chung

研究成果: Article同行評審

摘要

Laser-assisted direct imprinting (LADI) is an etch-free and high throughput fabrication process in the submicron scale, though complete theoretical modeling and physical analysis have not yet been investigated. The present study formulates, analyzes and discusses the laser-induced melting, elastic stretching and low-Reynolds number flow during a LADI fabrication process. With proper assumptions and simplifications for the proposed mathematical modeling, the physics involved has been well tackled and theoretical prediction as well as engineering optimization can be efficiently obtained. The predicted melting duration and imprinting depth show good agreement with the experimental measurement performed in our group.

原文English
文章編號035030
期刊Journal of Micromechanics and Microengineering
18
發行號3
DOIs
出版狀態Published - 2008 三月 1

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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