Controlling and testing the fracture strength of silicon on the mesoscale

Keyphrases

• Flexure 100%
• Biaxial Flexure 100%
• Weibull Statistics 50%
• Two-parameter Weibull 50%
• Strength Characterization 50%
• Weibull 50%
• Reactive Ions 50%
• Isotropic Etching 50%
• Design Cycle 50%
• Probabilistic Design 50%
• Local Strength 50%
• Weibull Model 50%
• Good Fit 50%
• Planar Biaxial 50%
• Multicrystalline Silicon 50%
• Deep Reactive Ion Etching 50%
• Fillet Radius 50%

Engineering

• Mesoscale 100%
• Flexure 100%
• Weibull Statistic 25%
• Silicon Single Crystal 25%
• Local Strength 25%
• Probabilistic Design 25%
• Design Cycle 25%
• Reactive Ion Etch 25%
• Fillet Radius 25%
• Measured Data 25%