Correlation between ID/IG ratio from visible Raman spectra and sp2/sp3 ratio from XPS spectra of annealed hydrogenated DLC film

F. C. Tai, S. C. Lee, C. H. Wei, Shing-Long Tyan

研究成果: Article

87 引文 斯高帕斯(Scopus)


The hydrogened diamond like carbon film (DLCH) with 1 urn thickness is made by hydrocarbon gas ion beam deposition method. The relationship between I D/IG ratio fitted from visible Raman spectra and sp 2/sp3 ratio done from XPS spectra of DLCH film shows a trend. The ID/IG ratio of deconvoluted visible Raman spectra shows a correlation with sp2/sp3 ratio from XPS spectra as annealing temperature increases, the graphitization and the disorder increase. The ID/IG ratios fitted with two-curve Gaussian functions of Raman spectra tend to be proportional to sp2/sp 3 ratio fitted with three-curve with 100% Gaussian function of XPS spectra when post annealed treatment is below 400°C and without severe oxidation.

頁(從 - 到)1847-1852
期刊Materials Transactions
出版狀態Published - 2006 七月 1


All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Metals and Alloys