Correlation between random telegraph noise and 1/f noise parameters in 28-nm pMOSFETs with tip-shaped SiGe source/drain

Bo Chin Wang, San Lein Wu, Chien Wei Huang, Yu Ying Lu, Shoou Jinn Chang, Yu Min Lin, Kun Hsien Lee, Osbert Cheng

研究成果: Article同行評審

12 引文 斯高帕斯(Scopus)

摘要

The random telegraph noise (RTN) characteristics of 28-nm pMOSFETs with tip-shaped SiGe source/drain have been investigated. RTN analysis found that strained devices undergo higher compressive strain; the trap position from the Si/SiO 2 interface is reduced, because of the closer trap energy level near the valence band. Although tip-shaped SiGe process induces higher oxide trap density, the trap position corresponding to the tunneling attenuation length (λ) may result in lower 1/f noise level in tip-shaped SiGe S/D devices as compared with that of control devices.

原文English
文章編號6203555
頁(從 - 到)928-930
頁數3
期刊IEEE Electron Device Letters
33
發行號7
DOIs
出版狀態Published - 2012

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料
  • 電氣與電子工程

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