Coupled multiphysics circuital modelling of micro-opto-mechanical pressure sensor systems

Benedetto Troia, Chih Hsien Huang, Shengping Mao, Hang Gao, Bruno Figeys, Roelof Jansen, Veronique Rochus, Xavier Rottenberg

研究成果: Conference contribution

1 引文 斯高帕斯(Scopus)

摘要

Micro-opto-mechanical pressure sensors (MOMPS) based on integrated optical Mach-Zehnder interferometers (MZI) have been fabricated at IMEC, exhibiting much improved sensitivity and noise performance compared to their piezoelectric and capacitive counterparts. However, the design of next generation MOMPS systems on chip still remains uncertain due to the intrinsic multiphysics nature covering mechanical, optical and electrical phenomena. For this reason, we present a sophisticated, flexible and customizable algorithmic tool for the multiphysics simulation and design of highperformance MOMPS systems on chip, including mechanical and optical effects as well as the electronic circuitry for the readout. Furthermore, static and dynamic operating regimes are analyzed, also comparing analytical solutions with experimental results and demonstrating a good agreement. Finally, system noise contributions generated by the optoelectronic components and readout electronics are calculated and a static sensitivity of 8 mV/Pa is measured in the fabricated sensors.

原文English
主出版物標題MOEMS and Miniaturized Systems XVII
編輯Yong-Hwa Park, Hans Zappe, Wibool Piyawattanametha
發行者SPIE
ISBN(電子)9781510615755
DOIs
出版狀態Published - 2018 一月 1
事件MOEMS and Miniaturized Systems XVII 2018 - San Francisco, United States
持續時間: 2018 一月 302018 一月 31

出版系列

名字Proceedings of SPIE - The International Society for Optical Engineering
10545
ISSN(列印)0277-786X
ISSN(電子)1996-756X

Other

OtherMOEMS and Miniaturized Systems XVII 2018
國家United States
城市San Francisco
期間18-01-3018-01-31

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • 引用此

    Troia, B., Huang, C. H., Mao, S., Gao, H., Figeys, B., Jansen, R., Rochus, V., & Rottenberg, X. (2018). Coupled multiphysics circuital modelling of micro-opto-mechanical pressure sensor systems. 於 Y-H. Park, H. Zappe, & W. Piyawattanametha (編輯), MOEMS and Miniaturized Systems XVII [1054518] (Proceedings of SPIE - The International Society for Optical Engineering; 卷 10545). SPIE. https://doi.org/10.1117/12.2290361