Crack alleviation processing of lead zirconate titanate thin films deposited by sol-gel method

Bing Huei Chen, Cheng Liang Huang, Long Wu

研究成果: Article同行評審

16 引文 斯高帕斯(Scopus)

摘要

This paper illustrates the preparation of polycrystalline Pb(Zr,Ti)O 3 (PZT) thin film using sol-gel processing and spin coating method. Lead acetate, zirconium n-propoxide and titanium isopropoxide were used as raw precursors. The PZT thin films with lower gel concentration of 0.2 and 0.3 M were used and deposited on Al/Si3N4/Si (100) substrate. After drying at 150 °C, pre-baking at 350 °C and sintering at 600-700 °C, the amorphous PZT thin films have been changed to perovskite-type crystal structure. The influence of gel solutions concentration and heating conditions on the morphology of PZT thin films were discussed. The cracking problem was alleviated by employing lower gel concentration of 0.2 M with a drying at 150 °C for 5 min and a pre-baking at 350 °C for 10 min, and then sintering at 700 °C for 30 min with a heating rate 50 °C/min. The values of the remanent polarization (Pr) and coercive field (E c) are 11.39 μc/cm2 and 84.52 KV/cm, respectively.

原文English
頁(從 - 到)13-18
頁數6
期刊Thin Solid Films
441
發行號1-2
DOIs
出版狀態Published - 2003 9月 22

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料
  • 表面和介面
  • 表面、塗料和薄膜
  • 金屬和合金
  • 材料化學

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