In this paper, a set of methods is developed to measure the Seebeck coefficient, electrical conductivity, and thermal conductivity in the cross-plane direction of thin films. The method employs microfabricated heaters, voltage and temperature sensors, and phase-lock amplifiers to determine the temperature and Seebeck voltage oscillation in the cross-plane direction of the samples, from which the thermal conductivity and Seebeck coefficient of thin films are determined simultaneously. The cross-plane electrical conductivity is also measured by a modified transmission line model. These methods are applied to Si/Ge superlattices grown by molecular beam epitaxy.
|頁（從 - 到）||71-76|
|期刊||Materials Research Society Symposium - Proceedings|
|出版狀態||Published - 2002|
|事件||Thermoelectric Materials 2001-Research and Applications - Boston, MA, United States|
持續時間: 2001 十一月 26 → 2001 十一月 29
All Science Journal Classification (ASJC) codes