Cross-sectional transmission electron microscopy of interface structure of β-FeSi2/Si(100) prepared by ion beam sputter deposition

Masato Sasase, Kenichiro Shimura, Hiroyuki Yamamoto, Kenji Yamaguchi, Shin Ichi Shamoto, Kiichi Hojou

研究成果: Article同行評審

10 引文 斯高帕斯(Scopus)

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Engineering & Materials Science

Physics & Astronomy