CuO nanowire-based humidity sensors prepared on glass substrate

H. T. Hsueh, T. J. Hsueh, S. J. Chang, F. Y. Hung, T. Y. Tsai, W. Y. Weng, C. L. Hsu, B. T. Dai

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100 引文 斯高帕斯(Scopus)

摘要

The authors report the growth of CuO nanowires (NWs) on glass substrate and the fabrication of CuO NW humidity sensors. It was found that average length of the CuO NWs increased from 0.4 μm to 2.8 and 6 μm, respectively, as we increased the initial copper film thickness from 0.5 μm to 1 and 2 μm after oxidation. It was also found that resistance of the CuO NWs increased as we increased the relative humidity due to the p-type nature of CuO. Furthermore, it was found that samples with a larger initial copper film thickness and thus a longer average CuO NW length could provide a larger sensor response.

原文English
頁(從 - 到)906-911
頁數6
期刊Sensors and Actuators, B: Chemical
156
發行號2
DOIs
出版狀態Published - 2011 8月

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料
  • 儀器
  • 凝聚態物理學
  • 表面、塗料和薄膜
  • 金屬和合金
  • 電氣與電子工程
  • 材料化學

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