Damascene process simulation using molecular dynamics

Shin Pon Ju, Cheng I. Weng, Chi Chuan Hwang

研究成果: Article同行評審

3 引文 斯高帕斯(Scopus)

摘要

Molecular dynamics was used to investigate trench filling in the damascene process. The qualitative behavior of the trench filling process was described in terms of the filling morphology and the filling characteristic. The significance of the geometric size of the simulation model was also evaluated. It was found that the geometric dimensions of the model become significant when the incident energy is small.

原文English
頁(從 - 到)7062-7069
頁數8
期刊Journal of Applied Physics
92
發行號12
DOIs
出版狀態Published - 2002 十二月 15

All Science Journal Classification (ASJC) codes

  • 物理與天文學 (全部)

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