摘要
Molecular dynamics was used to investigate trench filling in the damascene process. The qualitative behavior of the trench filling process was described in terms of the filling morphology and the filling characteristic. The significance of the geometric size of the simulation model was also evaluated. It was found that the geometric dimensions of the model become significant when the incident energy is small.
原文 | English |
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頁(從 - 到) | 7062-7069 |
頁數 | 8 |
期刊 | Journal of Applied Physics |
卷 | 92 |
發行號 | 12 |
DOIs | |
出版狀態 | Published - 2002 12月 15 |
All Science Journal Classification (ASJC) codes
- 一般物理與天文學