Molecular dynamics was used to investigate trench filling in the damascene process. The qualitative behavior of the trench filling process was described in terms of the filling morphology and the filling characteristic. The significance of the geometric size of the simulation model was also evaluated. It was found that the geometric dimensions of the model become significant when the incident energy is small.
All Science Journal Classification (ASJC) codes
- 物理與天文學 (全部)