Damping Enhancement and Positioning Control of Compliant Stages by Incorporating Rubber Shear Dampers

Yi Hsuan Yula, Kung Han Lee, Kuo Shen Chen, Yun Hui Liu

研究成果: Conference contribution

摘要

Metal compliant stages are critical subsystems in numerous precision motion control applications. By incorporating feedback control, their performance can be further improved. However, metals have inherently very low damping and it may difficult to add external passive dampers. Such a low damping capability would limit the effectiveness of controller design and even cause instability. As a result, how to effectively enhancing damping capability of compliant stage under space constraint is a non-trivial issue in precision positioning control. In this work, we propose the use of PDMS rubber shear damper to enhance the effective material damping of compliant structures. The effect of PDMS dimension on the resulted damping capability is then investigated by both 3D printed plastic and wire-cut metallic testing structures. The experimental results indicate that the PDMS materials can indeed enhance the damping ratios. Finally, a plastic 3D printed compliant stage is designed as a prototype for validating the design in stage control. The experimental results indicated that the controlled performance is indeed improved by incorporated with PDMS shear damper. With the concept validated, it is possible to implement rubber shear dampers in real metallic compliant structure for enhancing their performance. Ultimately, it is also possible to integrate this concept with metallic 3D printing technology to achieve light weight, high stiffness, and high damping structures.

原文English
主出版物標題2018 57th Annual Conference of the Society of Instrument and Control Engineers of Japan, SICE 2018
發行者Institute of Electrical and Electronics Engineers Inc.
頁面533-538
頁數6
ISBN(電子)9784907764609
DOIs
出版狀態Published - 2018 十月 15
事件57th Annual Conference of the Society of Instrument and Control Engineers of Japan, SICE 2018 - Nara, Japan
持續時間: 2018 九月 112018 九月 14

出版系列

名字2018 57th Annual Conference of the Society of Instrument and Control Engineers of Japan, SICE 2018

Other

Other57th Annual Conference of the Society of Instrument and Control Engineers of Japan, SICE 2018
國家Japan
城市Nara
期間18-09-1118-09-14

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Control and Optimization
  • Instrumentation

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  • 引用此

    Yula, Y. H., Lee, K. H., Chen, K. S., & Liu, Y. H. (2018). Damping Enhancement and Positioning Control of Compliant Stages by Incorporating Rubber Shear Dampers. 於 2018 57th Annual Conference of the Society of Instrument and Control Engineers of Japan, SICE 2018 (頁 533-538). [8492683] (2018 57th Annual Conference of the Society of Instrument and Control Engineers of Japan, SICE 2018). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.23919/SICE.2018.8492683