Data science framework for variable selection, metrology prediction, and process control in TFT-LCD manufacturing

Mathematics

• Costs 16%
• Data Mining 26%
• Empirical Study 25%
• Engineering 18%
• Filter 20%
• Framework 39%
• High Performance 29%
• Interaction Effects 30%
• Machine Learning 25%
• Main Effect 27%
• Manufacturing 76%
• Metrology 100%
• Predict 42%
• Prediction 54%
• Process Control 80%
• Process Monitoring 31%
• Production Line 35%
• Quality Control 27%
• Resources 21%
• Taiwan 34%
• Variable Selection 70%

Engineering & Materials Science

• Color 24%
• Costs 13%
• Data mining 28%
• Data Science 92%
• Design of experiments 31%
• Liquid crystal displays 73%
• Machine learning 25%
• Personnel 26%
• Process control 63%
• Process monitoring 38%
• Quality control 32%