Deastigmatism, circularization, and focusing of a laser diode beam using a single biconvex microlens

Md Nazmul Hasan, Muttahid Ull Haque, Yung Chun Lee

研究成果: Article同行評審

10 引文 斯高帕斯(Scopus)

摘要

A single biconvex microlens is proposed to correct the astigmatism and ellipticity of a laser diode (LD) beam and focus it to a smallest circular spot. The microlens has three different profiles in which one cylindrical input surface is to collimate the beam in the fast-axis (y-axis) direction. Output surface, on the other hand, holds two different parabolic profiles in fast-and slow-axis (x-axis) directions to correct the astigmatism and focus the beam into a smallest circular spot. A simulation software is used to design and optimize those lens profiles. Theoretically, the smallest focused spot size is around 4.24 μm in diameter. The three profiles are then transferred to photo-masks to fabricate the microlens on polycarbonate material using an excimer laser dragging method with alignment accuracy of 1 μm. The machined microlens is assembled with the LD using double-sided optically clear adhesive tape. The experimental focused spot is found to be 16.75 μm in diameter. Circularity of the focused spot is demonstrated by a single-shot exposure test on thin photoresist layer that shows a circular-dot diameter of 7.32 μm. The proposed technique has great potential in applications such as beam pen lithography, fiber coupling, and optical read-write head.

原文English
文章編號095107
期刊Optical Engineering
55
發行號9
DOIs
出版狀態Published - 2016 9月 1

All Science Journal Classification (ASJC) codes

  • 原子與分子物理與光學
  • 一般工程

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