DEPENDENCE OF PROPERTIES ON PLASMA POWER IN AN a-Si-H FILM.

C. Y. Chang, Y. K. Fang, W. L. Lin, W. C. Hsu

研究成果: Paper

2 引文 斯高帕斯(Scopus)
原文English
頁面368-374
頁數7
出版狀態Published - 1981 十二月 1

All Science Journal Classification (ASJC) codes

  • Engineering(all)

引用此

Chang, C. Y., Fang, Y. K., Lin, W. L., & Hsu, W. C. (1981). DEPENDENCE OF PROPERTIES ON PLASMA POWER IN AN a-Si-H FILM.. 368-374.