@conference{be55ba76ea3842e8b7781bd63a2ff528,
title = "DEPENDENCE OF PROPERTIES ON PLASMA POWER IN AN a-Si-H FILM.",
author = "Chang, {C. Y.} and Fang, {Y. K.} and Lin, {W. L.} and Hsu, {W. C.}",
year = "1981",
language = "English",
pages = "368--374",
}