Deposition of SiO2 layers on 4H-SiC by photochemical vapor deposition

Yu Zung Chiou, Chia Sheng Chang, Shoou Jinn Chang, Yan Kuin Su, Jung Ran Chiou, Bohr Ran Huang, Jone F. Chen

研究成果: Article同行評審

9 引文 斯高帕斯(Scopus)

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Engineering & Materials Science

Physics & Astronomy