Deposition of SiO2 layers on GaN by photochemical vapor deposition

Shoou Jinn Chang, Yan Kuin Su, Yu Zung Chiou, Jung Ran Chiou, Bohr Ran Huang, Chia Sheng Chang, Jone F. Chen

研究成果: Article同行評審

27 引文 斯高帕斯(Scopus)

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深入研究「Deposition of SiO<sub>2</sub> layers on GaN by photochemical vapor deposition」主題。共同形成了獨特的指紋。

Engineering & Materials Science

Chemical Compounds