Depositions of In_2xGa_2-2xO₃-based films and their application in the fabrication of a thin-film transistor

Keyphrases

• Thin-film Transistors 100%
• Electrical Properties 66%
• Resistivity 33%
• Carrier Concentration 33%
• X-ray Diffraction Pattern 33%
• X-ray Photoelectron Spectroscopy 33%
• Transmission Spectrum 33%
• RF Sputtering Method 33%
• High Resistivity 33%
• UV-VIS Spectroscopy 33%
• Composition Variation 33%
• Visible-infrared 33%
• Deposition Process 33%
• Wavelength Range 33%
• Absorption Edge 33%
• Crystalline Properties 33%
• Pure Argon 33%
• Hall Parameter 33%
• Infrared Spectrophotometry 33%

Material Science

• Film 100%
• Thin-Film Transistor 100%
• Electrical Resistivity 33%
• Carrier Concentration 16%
• X-Ray Photoelectron Spectroscopy 16%
• Diffraction Pattern 16%
• X-Ray Diffraction 16%