Design and analysis of piezoresistive microcantilever for surface stress measurement in biochemical sensor

S. M. Yang, T. I. Yin

研究成果: Article同行評審

52 引文 斯高帕斯(Scopus)

摘要

Piezoresistive microcantilever has been proposed to measure the surface stress generated by biochemical analytes. Such in situ measurement is desirable for biochemical sensors with on-chip microsystem integration. A two-dimensional model is presented to analyze the four-layer piezoresistive microcantilever subject to the surface stress effect generated by biochemical reaction and the thermal effect induced by the piezoresistive layer. Analysis shows that both effects are detrimental to sensor measurement. Conventional wisdom by changing the aspect ratio of a microcantilever is futile to achieve higher sensitivity. An improved design by having the stripe pattern on the immobilized layer is developed to increase the measurement sensitivity. Higher sensitivity can also be obtained by having thicker bottom insulation layer and thinner piezoresistive layer. It is shown that the microcantilever design is superior to the stress concentration region (SCR) design commonly seen in atomic force microscopy (AFM).

原文English
頁(從 - 到)736-744
頁數9
期刊Sensors and Actuators, B: Chemical
120
發行號2
DOIs
出版狀態Published - 2007 一月 10

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料
  • 儀器
  • 凝聚態物理學
  • 表面、塗料和薄膜
  • 金屬和合金
  • 電氣與電子工程
  • 材料化學

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