Design and characterisation of a compact 4-degree-of-freedom fast steering mirror system based on double Porro prisms for laser beam stabilization

Yu Hao Chang, Guangbo Hao, Chien Sheng Liu

研究成果: Article同行評審

5 引文 斯高帕斯(Scopus)

摘要

This paper proposes a 4-degree-of-freedom (DOF) actuator for a fast steer mirror (FSM) compensation system in order to compensate for 4-DOF laser errors. The mathematic system modeling was built to design and predict the performance of the proposed 4-DOF FSM. Finite element analysis was performed by using a commercial software to analyze the characteristics of the electromagnetic structure and mechanical structure for the proposed 4-DOF FSM. This study further verifies the properties of the proposed 4-DOF FSM by using a laboratory-built prototype. The proposed 4-DOF FSM has the travel range of ±5 mrad and ±0.04 mm along X and Y axes with accuracy of 0.025 mrad and 0.0012 mm and the bandwidth of rotational part and translational part are 10 Hz and 39 Hz, respectively.

原文English
文章編號112639
期刊Sensors and Actuators, A: Physical
322
DOIs
出版狀態Published - 2021 5月 1

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料
  • 儀器
  • 凝聚態物理學
  • 表面、塗料和薄膜
  • 金屬和合金
  • 電氣與電子工程

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