TY - JOUR
T1 - Design and Characterization of Four-Degree-of-Freedom Fast Steering Mirror for Laser Compensation System
AU - Liu, Chien Sheng
AU - Jiang, Kun Cheng
AU - Chen, Ming Fu
AU - Lin, Po Ming
N1 - Publisher Copyright:
© 1972-2012 IEEE.
PY - 2024/5/1
Y1 - 2024/5/1
N2 - The accuracy and stability of laser are influenced not only by external environmental factors but also by the laser internal structure, heat source, input source, etc., resulting in four-degree-of-freedom (4-DOF) laser disturbances. In this study, to reduce the laser disturbances and improve laser quality, a 4-DOF fast steering mirror (FSM) with double Porro prisms, which is driven by a voice coil motor (VCM), was designed for a laser compensation system. The 4-DOF FSM addressed the limitations of commercial laser compensation systems by achieving a shorter optical path length, reducing the number of components, and simplifying the setup of laser compensation systems at various positions. Furthermore, it enhanced the static and dynamic performance of a 4-DOF FSM proposed in a previous study. Finite element analysis was conducted to analyze both the electromagnetic structure and mechanical structure of the proposed 4-DOF FSM. Furthermore, a mathematical model was established for its motion dynamics, ensuring that its static and dynamic performance satisfied the conditions of compensating laser disturbances. Finally, a PID closed-loop control was established for the 4-DOF FSM laser compensation system. By comparing the differences before and after laser compensation using the 4-DOF FSM, the compensatory function of the 4-DOF laser compensation system was validated, achieving real-time compensation for laser disturbances.
AB - The accuracy and stability of laser are influenced not only by external environmental factors but also by the laser internal structure, heat source, input source, etc., resulting in four-degree-of-freedom (4-DOF) laser disturbances. In this study, to reduce the laser disturbances and improve laser quality, a 4-DOF fast steering mirror (FSM) with double Porro prisms, which is driven by a voice coil motor (VCM), was designed for a laser compensation system. The 4-DOF FSM addressed the limitations of commercial laser compensation systems by achieving a shorter optical path length, reducing the number of components, and simplifying the setup of laser compensation systems at various positions. Furthermore, it enhanced the static and dynamic performance of a 4-DOF FSM proposed in a previous study. Finite element analysis was conducted to analyze both the electromagnetic structure and mechanical structure of the proposed 4-DOF FSM. Furthermore, a mathematical model was established for its motion dynamics, ensuring that its static and dynamic performance satisfied the conditions of compensating laser disturbances. Finally, a PID closed-loop control was established for the 4-DOF FSM laser compensation system. By comparing the differences before and after laser compensation using the 4-DOF FSM, the compensatory function of the 4-DOF laser compensation system was validated, achieving real-time compensation for laser disturbances.
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U2 - 10.1109/TIA.2024.3360028
DO - 10.1109/TIA.2024.3360028
M3 - Article
AN - SCOPUS:85184322756
SN - 0093-9994
VL - 60
SP - 3850
EP - 3859
JO - IEEE Transactions on Industry Applications
JF - IEEE Transactions on Industry Applications
IS - 3
ER -