Design and Characterization of Four-Degree-of-Freedom Fast Steering Mirror for Laser Compensation System

Chien Sheng Liu, Kun Cheng Jiang, Ming Fu Chen, Po Ming Lin

研究成果: Article同行評審

2 引文 斯高帕斯(Scopus)

摘要

The accuracy and stability of laser are influenced not only by external environmental factors but also by the laser internal structure, heat source, input source, etc., resulting in four-degree-of-freedom (4-DOF) laser disturbances. In this study, to reduce the laser disturbances and improve laser quality, a 4-DOF fast steering mirror (FSM) with double Porro prisms, which is driven by a voice coil motor (VCM), was designed for a laser compensation system. The 4-DOF FSM addressed the limitations of commercial laser compensation systems by achieving a shorter optical path length, reducing the number of components, and simplifying the setup of laser compensation systems at various positions. Furthermore, it enhanced the static and dynamic performance of a 4-DOF FSM proposed in a previous study. Finite element analysis was conducted to analyze both the electromagnetic structure and mechanical structure of the proposed 4-DOF FSM. Furthermore, a mathematical model was established for its motion dynamics, ensuring that its static and dynamic performance satisfied the conditions of compensating laser disturbances. Finally, a PID closed-loop control was established for the 4-DOF FSM laser compensation system. By comparing the differences before and after laser compensation using the 4-DOF FSM, the compensatory function of the 4-DOF laser compensation system was validated, achieving real-time compensation for laser disturbances.

原文English
頁(從 - 到)3850-3859
頁數10
期刊IEEE Transactions on Industry Applications
60
發行號3
DOIs
出版狀態Published - 2024 5月 1

All Science Journal Classification (ASJC) codes

  • 控制與系統工程
  • 工業與製造工程
  • 電氣與電子工程

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