Design and characterization of precise laser-based autofocusing microscope with reduced geometrical fluctuations

Chien-Sheng Liu, Yang Cheng Lin, Pin Hao Hu

研究成果: Article同行評審

23 引文 斯高帕斯(Scopus)

摘要

Due to consumer preference for products with ever higher performance, a requirement exists for precise autofocusing microscope systems to perform the inspection process in automated mass production lines. Accordingly, the present study proposes a laser-based microscope system in which a precise autofocusing capability is achieved using a position feedback signal based on the distance L between the geometrical center (X c, Y c ) of the image captured by the CCD sensor and the centroid (x centroid, y centroid ) of the image. The experimental results show that the proposed system has a positioning accuracy of 2.2 μm and a response time of 1 s given a working range of ±200 μm. The autofocusing performance of the proposed system is thus better than that of a conventional centroid-based system, which typically achieves a positioning accuracy of around 5.2 μm.

原文English
頁(從 - 到)1717-1724
頁數8
期刊Microsystem Technologies
19
發行號11
DOIs
出版狀態Published - 2013 十一月 1

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料
  • 凝聚態物理學
  • 硬體和架構
  • 電氣與電子工程

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