Design and characterization of precise laser-based autofocusing microscope with reduced geometrical fluctuations

Chien Sheng Liu, Yang Cheng Lin, Pin Hao Hu

研究成果: Conference contribution

摘要

The present study proposes a laser-based microscope system in which a precise autofocusing capability is achieved using a position feedback signal based on the distance L between the geometrical center (Xc, Yc) of the image captured by the CCD sensor and the centroid (xcentroid, ycentroid) of the image. The experimental results show that the proposed system has a positioning accuracy of 2.2 μm given a working range of ±200 μm. The autofocusing performance of the proposed system is thus better than that of a conventional centroid-based system, which typically achieves a positioning accuracy of around 5.2 μm.

原文English
主出版物標題Innovation for Applied Science and Technology
頁面672-676
頁數5
DOIs
出版狀態Published - 2013
事件2nd International Conference on Engineering and Technology Innovation 2012, ICETI 2012 - Kaohsiung, Taiwan
持續時間: 2012 十一月 22012 十一月 6

出版系列

名字Applied Mechanics and Materials
284-287
ISSN(列印)1660-9336
ISSN(電子)1662-7482

Other

Other2nd International Conference on Engineering and Technology Innovation 2012, ICETI 2012
國家/地區Taiwan
城市Kaohsiung
期間12-11-0212-11-06

All Science Journal Classification (ASJC) codes

  • 工程 (全部)

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