Design and control of a long-traveling nano-positioning stage

Chien Hung Liu, Wen Yuh Jywe, Yeau Ren Jeng, Tung Hui Hsu, Yi tsung Li

研究成果: Article同行評審

63 引文 斯高帕斯(Scopus)

摘要

In this paper, a Dual-Axis Long-Traveling Nano-Positioning Stage (DALTNPS) is presented. In order to extend the traveling and increase the accuracy, the two sorts of stages, a traditional ball-screw stage and a three-degrees-of-freedom (3-DOF) piezo-stage, were composed. The traditional ball-screw stage which is composed of two guide-ways and a ball-screw at each axis is a long-travel stage, and the 3-DOF piezo-stage, which is composed of three piezoelectric actuators and four translation-rotation mechanisms, is a high precision stage. In addition, a 3-DOF measuring system and a PID controller are composed of a 3-DOF closed-loop controller and applied to implement the DALTNPS. The measuring system which is composed of two laser interferometers and two plane mirrors is a 3-DOF optical measuring system. Thus, the position at the x and y axes and the rotation around the z axis can be obtained and they are the responses of DALTNPS. Finally, the experiment results evidence that the DALTNPS is characterized by long-travel, high linear accuracy, high rotation accuracy, high contouring accuracy and high motion speed.

原文English
頁(從 - 到)497-506
頁數10
期刊Precision Engineering
34
發行號3
DOIs
出版狀態Published - 2010 七月 1

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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