Design and fabrication of a novel tri-axis micro-gyroscope

Nan-Chyuan Tsai, Chung Yang Sue, Chih Che Lin

研究成果: Conference contribution

3 引文 斯高帕斯(Scopus)

摘要

This paper presents an innovative micro-gyroscope which possesses the capability of detecting tri-axis angular motions. The coupling effect of the tri-axis angular rates due to Coriolis acceleration and nonlinearity of the high frequency modes can be efficiently reduced by the decoupled mechanical structure design. In order to ensure further repeatability and reliability, the suspension flexures and stiffness are examined by Finite Element Method (FEM) and compared with simplified mathematical analysis by conventional beam deformation theories. Finally, the sensitivity and nonlinearity of tri-axis gyroscopes are theoretically investigated and evaluated.

原文English
主出版物標題3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008
頁面457-461
頁數5
DOIs
出版狀態Published - 2008 九月 1
事件3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008 - Sanya, China
持續時間: 2008 一月 62008 一月 9

出版系列

名字3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS

Other

Other3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008
國家China
城市Sanya
期間08-01-0608-01-09

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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