Design and fabrication of high power electromagnetic microactuator with perpendicular magnetic anisotropy

C. T. Pan, Sheng-Chih Shen, H. P. Chou

研究成果: Conference contribution

摘要

A novel microactuator has presented by this research. The high power electromagnetic microactuator combines of innovative hard magnetic Fe/Pt process, high Ni/Fe permalloy magnetic circuit design technique, bulk micromachming and excimer laser ablation. The hard magnetic material is Fe/Pt which is deposited under low temperature by sputter on the suspension diaphragm to offer perpendicular magnetic anisotropy field. The magnetic circuit with close loop is applied to concentrate the magnetic flux and increases magnetic force. Therefore, the magnetic field induced by the magnetic field of the planar coil and Ni/Fe permalloy can be enhanced, which will interact with Fe/Pt and induce huge displacement, large force output and high frequency. The high power electromagnetic microactuator has been demonstrated magnetic force 2 times larger than conventional magnetic microactuator.

原文English
主出版物標題Micro-Electro-Mechanical Systems (MEMS) - 2001
編輯A.L. Lee, J. Simon, K. Breuer, S. Chen, R.S. Keynton, A. Malshe, J.-I. Mou, M. Dunn
頁面185-190
頁數6
3
出版狀態Published - 2001
事件2001 ASME International Mechanical Engineering Congress and Exposition - New York, NY, United States
持續時間: 2001 十一月 112001 十一月 16

Other

Other2001 ASME International Mechanical Engineering Congress and Exposition
國家United States
城市New York, NY
期間01-11-1101-11-16

指紋

Microactuators
Magnetic anisotropy
Fabrication
Magnetic circuits
Magnetic fields
Magnetic materials
Excimer lasers
Laser ablation
Magnetic flux
Diaphragms
Temperature

All Science Journal Classification (ASJC) codes

  • Engineering(all)

引用此文

Pan, C. T., Shen, S-C., & Chou, H. P. (2001). Design and fabrication of high power electromagnetic microactuator with perpendicular magnetic anisotropy. 於 A. L. Lee, J. Simon, K. Breuer, S. Chen, R. S. Keynton, A. Malshe, J-I. Mou, ... M. Dunn (編輯), Micro-Electro-Mechanical Systems (MEMS) - 2001 (卷 3, 頁 185-190)
Pan, C. T. ; Shen, Sheng-Chih ; Chou, H. P. / Design and fabrication of high power electromagnetic microactuator with perpendicular magnetic anisotropy. Micro-Electro-Mechanical Systems (MEMS) - 2001. 編輯 / A.L. Lee ; J. Simon ; K. Breuer ; S. Chen ; R.S. Keynton ; A. Malshe ; J.-I. Mou ; M. Dunn. 卷 3 2001. 頁 185-190
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abstract = "A novel microactuator has presented by this research. The high power electromagnetic microactuator combines of innovative hard magnetic Fe/Pt process, high Ni/Fe permalloy magnetic circuit design technique, bulk micromachming and excimer laser ablation. The hard magnetic material is Fe/Pt which is deposited under low temperature by sputter on the suspension diaphragm to offer perpendicular magnetic anisotropy field. The magnetic circuit with close loop is applied to concentrate the magnetic flux and increases magnetic force. Therefore, the magnetic field induced by the magnetic field of the planar coil and Ni/Fe permalloy can be enhanced, which will interact with Fe/Pt and induce huge displacement, large force output and high frequency. The high power electromagnetic microactuator has been demonstrated magnetic force 2 times larger than conventional magnetic microactuator.",
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Pan, CT, Shen, S-C & Chou, HP 2001, Design and fabrication of high power electromagnetic microactuator with perpendicular magnetic anisotropy. 於 AL Lee, J Simon, K Breuer, S Chen, RS Keynton, A Malshe, J-I Mou & M Dunn (編輯), Micro-Electro-Mechanical Systems (MEMS) - 2001. 卷 3, 頁 185-190, 2001 ASME International Mechanical Engineering Congress and Exposition, New York, NY, United States, 01-11-11.

Design and fabrication of high power electromagnetic microactuator with perpendicular magnetic anisotropy. / Pan, C. T.; Shen, Sheng-Chih; Chou, H. P.

Micro-Electro-Mechanical Systems (MEMS) - 2001. 編輯 / A.L. Lee; J. Simon; K. Breuer; S. Chen; R.S. Keynton; A. Malshe; J.-I. Mou; M. Dunn. 卷 3 2001. p. 185-190.

研究成果: Conference contribution

TY - GEN

T1 - Design and fabrication of high power electromagnetic microactuator with perpendicular magnetic anisotropy

AU - Pan, C. T.

AU - Shen, Sheng-Chih

AU - Chou, H. P.

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Y1 - 2001

N2 - A novel microactuator has presented by this research. The high power electromagnetic microactuator combines of innovative hard magnetic Fe/Pt process, high Ni/Fe permalloy magnetic circuit design technique, bulk micromachming and excimer laser ablation. The hard magnetic material is Fe/Pt which is deposited under low temperature by sputter on the suspension diaphragm to offer perpendicular magnetic anisotropy field. The magnetic circuit with close loop is applied to concentrate the magnetic flux and increases magnetic force. Therefore, the magnetic field induced by the magnetic field of the planar coil and Ni/Fe permalloy can be enhanced, which will interact with Fe/Pt and induce huge displacement, large force output and high frequency. The high power electromagnetic microactuator has been demonstrated magnetic force 2 times larger than conventional magnetic microactuator.

AB - A novel microactuator has presented by this research. The high power electromagnetic microactuator combines of innovative hard magnetic Fe/Pt process, high Ni/Fe permalloy magnetic circuit design technique, bulk micromachming and excimer laser ablation. The hard magnetic material is Fe/Pt which is deposited under low temperature by sputter on the suspension diaphragm to offer perpendicular magnetic anisotropy field. The magnetic circuit with close loop is applied to concentrate the magnetic flux and increases magnetic force. Therefore, the magnetic field induced by the magnetic field of the planar coil and Ni/Fe permalloy can be enhanced, which will interact with Fe/Pt and induce huge displacement, large force output and high frequency. The high power electromagnetic microactuator has been demonstrated magnetic force 2 times larger than conventional magnetic microactuator.

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Pan CT, Shen S-C, Chou HP. Design and fabrication of high power electromagnetic microactuator with perpendicular magnetic anisotropy. 於 Lee AL, Simon J, Breuer K, Chen S, Keynton RS, Malshe A, Mou J-I, Dunn M, 編輯, Micro-Electro-Mechanical Systems (MEMS) - 2001. 卷 3. 2001. p. 185-190