Design and fabrication of high power electromagnetic microactuator with perpendicular magnetic anisotropy

C. T. Pan; Sheng-Chih Shen; H. P. Chou

Design and fabrication of high power electromagnetic microactuator with perpendicular magnetic anisotropy

C. T. Pan, Sheng-Chih Shen, H. P. Chou

系統及船舶機電工程學系

研究成果: Conference contribution

摘要

A novel microactuator has presented by this research. The high power electromagnetic microactuator combines of innovative hard magnetic Fe/Pt process, high Ni/Fe permalloy magnetic circuit design technique, bulk micromachming and excimer laser ablation. The hard magnetic material is Fe/Pt which is deposited under low temperature by sputter on the suspension diaphragm to offer perpendicular magnetic anisotropy field. The magnetic circuit with close loop is applied to concentrate the magnetic flux and increases magnetic force. Therefore, the magnetic field induced by the magnetic field of the planar coil and Ni/Fe permalloy can be enhanced, which will interact with Fe/Pt and induce huge displacement, large force output and high frequency. The high power electromagnetic microactuator has been demonstrated magnetic force 2 times larger than conventional magnetic microactuator.

原文	English
主出版物標題	Micro-Electro-Mechanical Systems (MEMS) - 2001
編輯	A.L. Lee, J. Simon, K. Breuer, S. Chen, R.S. Keynton, A. Malshe, J.-I. Mou, M. Dunn
頁面	185-190
頁數	6
卷	3
出版狀態	Published - 2001
事件	2001 ASME International Mechanical Engineering Congress and Exposition - New York, NY, United States 持續時間: 2001 11月 11 → 2001 11月 16

Other

Other	2001 ASME International Mechanical Engineering Congress and Exposition
國家/地區	United States
城市	New York, NY
期間	01-11-11 → 01-11-16

All Science Journal Classification (ASJC) codes

工程 (全部)

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@inproceedings{370a4e0672f54b4fb83818d0b9dc5336,

title = "Design and fabrication of high power electromagnetic microactuator with perpendicular magnetic anisotropy",

abstract = "A novel microactuator has presented by this research. The high power electromagnetic microactuator combines of innovative hard magnetic Fe/Pt process, high Ni/Fe permalloy magnetic circuit design technique, bulk micromachming and excimer laser ablation. The hard magnetic material is Fe/Pt which is deposited under low temperature by sputter on the suspension diaphragm to offer perpendicular magnetic anisotropy field. The magnetic circuit with close loop is applied to concentrate the magnetic flux and increases magnetic force. Therefore, the magnetic field induced by the magnetic field of the planar coil and Ni/Fe permalloy can be enhanced, which will interact with Fe/Pt and induce huge displacement, large force output and high frequency. The high power electromagnetic microactuator has been demonstrated magnetic force 2 times larger than conventional magnetic microactuator.",

author = "Pan, {C. T.} and Sheng-Chih Shen and Chou, {H. P.}",

year = "2001",

language = "English",

isbn = "0791835553",

volume = "3",

pages = "185--190",

editor = "A.L. Lee and J. Simon and K. Breuer and S. Chen and R.S. Keynton and A. Malshe and J.-I. Mou and M. Dunn",

booktitle = "Micro-Electro-Mechanical Systems (MEMS) - 2001",

note = "2001 ASME International Mechanical Engineering Congress and Exposition ; Conference date: 11-11-2001 Through 16-11-2001",

}

Pan, CT, Shen, S-C & Chou, HP 2001, Design and fabrication of high power electromagnetic microactuator with perpendicular magnetic anisotropy. 於 AL Lee, J Simon, K Breuer, S Chen, RS Keynton, A Malshe, J-I Mou & M Dunn (編輯), Micro-Electro-Mechanical Systems (MEMS) - 2001. 卷 3, 頁 185-190, 2001 ASME International Mechanical Engineering Congress and Exposition, New York, NY, United States, 01-11-11.

TY - GEN

T1 - Design and fabrication of high power electromagnetic microactuator with perpendicular magnetic anisotropy

AU - Pan, C. T.

AU - Shen, Sheng-Chih

AU - Chou, H. P.

PY - 2001

Y1 - 2001

N2 - A novel microactuator has presented by this research. The high power electromagnetic microactuator combines of innovative hard magnetic Fe/Pt process, high Ni/Fe permalloy magnetic circuit design technique, bulk micromachming and excimer laser ablation. The hard magnetic material is Fe/Pt which is deposited under low temperature by sputter on the suspension diaphragm to offer perpendicular magnetic anisotropy field. The magnetic circuit with close loop is applied to concentrate the magnetic flux and increases magnetic force. Therefore, the magnetic field induced by the magnetic field of the planar coil and Ni/Fe permalloy can be enhanced, which will interact with Fe/Pt and induce huge displacement, large force output and high frequency. The high power electromagnetic microactuator has been demonstrated magnetic force 2 times larger than conventional magnetic microactuator.

AB - A novel microactuator has presented by this research. The high power electromagnetic microactuator combines of innovative hard magnetic Fe/Pt process, high Ni/Fe permalloy magnetic circuit design technique, bulk micromachming and excimer laser ablation. The hard magnetic material is Fe/Pt which is deposited under low temperature by sputter on the suspension diaphragm to offer perpendicular magnetic anisotropy field. The magnetic circuit with close loop is applied to concentrate the magnetic flux and increases magnetic force. Therefore, the magnetic field induced by the magnetic field of the planar coil and Ni/Fe permalloy can be enhanced, which will interact with Fe/Pt and induce huge displacement, large force output and high frequency. The high power electromagnetic microactuator has been demonstrated magnetic force 2 times larger than conventional magnetic microactuator.

UR - http://www.scopus.com/inward/record.url?scp=1542432808&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=1542432808&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:1542432808

SN - 0791835553

VL - 3

SP - 185

EP - 190

BT - Micro-Electro-Mechanical Systems (MEMS) - 2001

A2 - Lee, A.L.

A2 - Simon, J.

A2 - Breuer, K.

A2 - Chen, S.

A2 - Keynton, R.S.

A2 - Malshe, A.

A2 - Mou, J.-I.

A2 - Dunn, M.

T2 - 2001 ASME International Mechanical Engineering Congress and Exposition

Y2 - 11 November 2001 through 16 November 2001

ER -

Design and fabrication of high power electromagnetic microactuator with perpendicular magnetic anisotropy

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