Design and fabrication of lens selectively coated with TFMG for uniform intensity of UV LED

P. H. Lin, C. T. Pan, Y. C. Chen, F. T. Hsu, P. H. Lin, S. C. Shen, J. C. Huang, C. M. Chang

研究成果: Conference contribution

1 引文 斯高帕斯(Scopus)

摘要

This UV LED lighting technology developed in this study is expected to be applied to photolithography industry. Since the accuracy of the degree of cross linking and sidewall profile could be affected by intensity of UV light dosage, this research proposes optical design and fabrication of free-curved lens for light source element of UV LED for exposure machines. In this study, the optical intensity distributions of the lens with TFMG were determined by using commercial optical simulation FRED software. Based on the design, the lenses were fabricated using thermoforming of optical glass and PMMA, respectively. Then the lens is selectively coated with thin film metallic glasses (TFMG, Ag30 Mg45 Al25). For the TFMG coating, multi-target sputtering system is applied to sputter TFMG reflecting film on the surface of lens with thickness of 100 nm to 300 nm. With the both design of TFMG selective deposition and lens curve, the optical field of Lambertian emission patterns of UV LED can be transformed to uniform profile. Through this design of reflection of UV LED light source, the intensity and uniformity could be enhanced. UV LED light source with 360 to 390 nm in wavelength was chosen as light source to simulate the effects of I-line and G-line. The specific wavelength of UV light is measured by spectrometer (USB2000+VIS-NIR, Ocean Optics) and BM7.

原文English
主出版物標題9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014
發行者Institute of Electrical and Electronics Engineers Inc.
頁面477-480
頁數4
ISBN(電子)9781479947270
DOIs
出版狀態Published - 2014 九月 23
事件9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014 - Waikiki Beach, United States
持續時間: 2014 四月 132014 四月 16

出版系列

名字9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014

Other

Other9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014
國家/地區United States
城市Waikiki Beach
期間14-04-1314-04-16

All Science Journal Classification (ASJC) codes

  • 控制與系統工程
  • 電氣與電子工程

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