Design and fabrication of micro oxygen sensor

Chia Yen Lee, Long Kai Lin Liou, Chin Lung Chang, Chang Hsing Tai, Lung Ming Fu

研究成果: Conference contribution

摘要

In the study, a MEMS-based gas sensor is presented, which consists of a sensing thin film deposited by RF sputtering and annealed at 375°C. The structure and surface pattern of the thin film are analyzed by XRD and SEM. The sensor consists of a substrate, Pt interdigitated electrodes and an SnO 2 sensing layer. As concentration of oxygen changes, a change in the electrical conductivity of the SnO2 film is caused. The experimental results show that the measured resistance increases as the concentration of oxygen increases at a working temperature of 300°C. A good oxygen sensing performance is presented in the study.

原文English
主出版物標題MEMS/NEMS Nano Technology
發行者Trans Tech Publications Ltd
頁面237-242
頁數6
ISBN(列印)9783037851753
DOIs
出版狀態Published - 2011

出版系列

名字Key Engineering Materials
483
ISSN(列印)1013-9826
ISSN(電子)1662-9795

All Science Journal Classification (ASJC) codes

  • 材料科學(全部)
  • 材料力學
  • 機械工業

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