Design and fabrication of microfluidic devices integrated with an open-ended MEMS probe for single-cell impedance measurement

Ling Sheng Jang, Hsin Hung Li, Jen Yu Jao, Ming Kun Chen, Chia Feng Liu

研究成果: Article同行評審

9 引文 斯高帕斯(Scopus)

摘要

When an electrical current with a low frequency is applied to a cell, the current passes through the outside of the cell. Thus, impedance measurements at low frequencies cannot be used to determine the pathological change of the cellular organelle taking place inside the cell. However, increasing the frequency of the electrical current makes the capacitive impedance of the cell decrease, allowing the electrical current to flow through the cell. This study presents the design and fabrication of a microfluidic device integrated with a coplanar waveguide open-ended micro-electro-mechanical-systems (MEMS) probe for the impedance measurement of the single HeLa cell in frequencies between 1 MHz and 1 GHz. The device includes a poly-dimethlysiloxane (PDMS) cover with a microchannel and microstructures to capture the single HeLa cell and a conductor-backed CPW fabricated using a silicon chip and two printed circuit boards (PCB). The effects of the substrate on the characteristic impedance of the conductor-backed coplanar waveguide (CBCPW) structure were investigated under three conditions by utilizing a time-domain reflectometer (TDR). Finally, impedance measurements using the proposed device and a vector network analyzer (VNA) are demonstrated for de-ionized (DI) water, alcohol, PBS, and a single HeLa cell.

原文English
頁(從 - 到)509-519
頁數11
期刊Microfluidics and Nanofluidics
8
發行號4
DOIs
出版狀態Published - 2010 四月

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料
  • 凝聚態物理學
  • 材料化學

指紋

深入研究「Design and fabrication of microfluidic devices integrated with an open-ended MEMS probe for single-cell impedance measurement」主題。共同形成了獨特的指紋。

引用此