@inproceedings{6b19a073191d498fb50b541717575576,
title = "Design and Fabrication of Ozone Sensor based on WO3thin film",
abstract = "A Micro-Electro-Mechanical Systems based tungsten trioxide thin film micro-ozone sensor is prepared using physical vapor deposition techniques. Given a sufficiently high working temperature, the resistance of the tungsten trioxide film increases linearly with an increasing ozone concentration. The effects of variations in the working temperature on the resistance of the tungsten trioxide sensing layer are suppressed by a PID feedback control system implemented in LabVIEW. It is shown that a working temperature of 250°C results in the device's maximum sensitivity (3.32 MΩ/ppm) and minimum response time (17 seconds).",
author = "Hung, \{Yi Cheng\} and Lin, \{Zih Yue\} and Fu, \{Lung Ming\} and Lee, \{Chia Yen\}",
note = "Publisher Copyright: {\textcopyright} 2023 IEEE.; 9th International Conference on Applied System Innovation, ICASI 2023 ; Conference date: 21-04-2023 Through 25-04-2023",
year = "2023",
doi = "10.1109/ICASI57738.2023.10179582",
language = "English",
series = "2023 9th International Conference on Applied System Innovation, ICASI 2023",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "190--192",
editor = "Shoou-Jinn Chang and Sheng-Joue Young and Lam, \{Artde Donald Kin-Tak\} and Liang-Wen Ji and Prior, \{Stephen D.\}",
booktitle = "2023 9th International Conference on Applied System Innovation, ICASI 2023",
address = "United States",
}