Design and fabrication of polymeric micro-optical components using excimer laser ablation

C. T. Pan, S. C. Shen

研究成果: Article同行評審

4 引文 斯高帕斯(Scopus)

摘要

Numerical simulation was used to predict the profile of a three-dimensional aspherical microlens and a microprism array. Based on the simulated results, the desired micro-optical lens profile was obtained using excimer laser ablated polyimide. The simulation method applied to excimer laser ablation can significantly reduce the quantity of microablation experiments. Ablated microstructures with surface roughness Ra <20 nm were successfully achieved for micro-optical components. The excimer laser ablation parameters included laser fluence, shot number, workstation velocity, and repetition rate. Numerical simulation can be applied to predict various profiles of microlens and microprism arrays with different dimensions, the desired geometries being formed by laser ablation.

原文English
頁(從 - 到)270-274
頁數5
期刊Materials Science and Technology
20
發行號2
DOIs
出版狀態Published - 2004 二月

All Science Journal Classification (ASJC) codes

  • 材料科學(全部)
  • 凝聚態物理學
  • 材料力學
  • 機械工業

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