Design and fabrication of single-walled carbon nanonet flexible strain sensors

Ya Ting Huang, Shyh Chour Huang, Chih Chao Hsu, Ru Min Chao, Trung Kien Vu

研究成果: Article同行評審

9 引文 斯高帕斯(Scopus)

摘要

This study presents a novel flexible strain sensor for real-time strain sensing. The material for strain sensing is single-walled carbon nanonets, grown using the alcohol catalytic chemical vapor deposition method, that were encapsulated between two layers of Parylene-C, with a polyimide layer as the sensing surface. All of the micro-fabrication was compatible with the standard IC process. Experimental results indicated that the gauge factor of the proposed strain sensor was larger than 4.5, approximately 2.0 times greater than those of commercial gauges. The results also demonstrated that the gauge factor is small when the growth time of SWCNNs is lengthier, and the gauge factor is large when the line width of the serpentine pattern of SWCNNs is small.

原文English
頁(從 - 到)3269-3280
頁數12
期刊Sensors
12
發行號3
DOIs
出版狀態Published - 2012 三月

All Science Journal Classification (ASJC) codes

  • 分析化學
  • 生物化學
  • 原子與分子物理與光學
  • 儀器
  • 電氣與電子工程

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