Design and implementation of a novel poly-Si single proof-mass differential capacitive-sensing 3-axis accelerometer

S. C. Lo, C. K. Chan, W. C. Lai, M. Wu, Y. C. Lin, W. Fang

研究成果: Conference contribution

3 引文 斯高帕斯(Scopus)

摘要

This study presents a novel single proof-mass 3-axis capacitive-type accelerometer design consisting of poly-Si rib-proofmass, springs, high-aspect-ratio in-plane sensing electrodes, and plate-type out-of-plane sensing electrodes. This single proof-mass accelerometer design has three merits to increase the sensitivity, (1) large area plate-type out-of-plane gap-closing sensing electrodes with differential capacitive-sensing capability; (2) large area high-aspect-ratio in-plane gap-closing sensing electrodes; (3) electrical routings for 3-axis sensing are considered, and (4) thick ribs to remarkably increase the proof-mass. The single proof-mass 3-axis accelerometer is implemented using well-known two poly-Si and trench refill processes. Measurements (0.1G3G) show that sensitivities (non-linearity) of etch direction are X-axis:4.31mV/G (2.72%), Y-axis:4.30mV/G (2.57%), and Z-axis:3.48mV/G (2.91%).

原文English
主出版物標題2013 Transducers and Eurosensors XXVII
主出版物子標題The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
頁面1819-1822
頁數4
DOIs
出版狀態Published - 2013 十二月 1
事件2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 - Barcelona, Spain
持續時間: 2013 六月 162013 六月 20

出版系列

名字2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

Other

Other2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
國家/地區Spain
城市Barcelona
期間13-06-1613-06-20

All Science Journal Classification (ASJC) codes

  • 硬體和架構
  • 電氣與電子工程

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