Design and implementation of an intelligent prognostics system

Yu Chuan Su, Fan Tien Cheng, Min Hsiung Hung, Yen Chang Lin, Rung Chuan Lin

研究成果: Conference contribution

3 引文 斯高帕斯(Scopus)

摘要

This work proposes an intelligent prognostics system (IPS) for semiconductor and TFT-LCD manufacturing. The IPS comprises several generic embedded devices (GEDs) and a remote host. The GED can be easily embedded into various types of equipment to acquire equipment-engineering data and meet the specification requirements of Interface A for supporting semiconductor industry e-diagnostics. Furthermore, the GED has an open-standard application interface offering any pluggable and customized intelligent-maintenance applications. With this feature, intelligent-maintenance tasks can be distributed and localized releasing the factory network burden and enhancing equipment reliability and maintainability. This work also develops two typical Pluggable Applications: the predictive maintenance scheme (PMS) for equipment fault detection, and the quality prognostics scheme (QPS) for virtual metrology and product quality prediction. Integrating the PMS into the IPS and the QPS into the IPS are respectively accomplished using the conveyor equipment and the sputtering equipment of a TFT-LCD factory. These two illustrative examples clearly demonstrate that IPS is versatile, configurable, and effective.

原文English
主出版物標題Proceedings of the 2005 IEEE Conference on Automation Science and Engineering, IEEE-CASE 2005
頁面273-278
頁數6
DOIs
出版狀態Published - 2005 十二月 1
事件2005 IEEE Conference on Automation Science and Engineering, IEEE-CASE 2005 - Edmonton, Canada
持續時間: 2005 八月 12005 八月 2

出版系列

名字Proceedings of the 2005 IEEE Conference on Automation Science and Engineering, IEEE-CASE 2005
2005

Other

Other2005 IEEE Conference on Automation Science and Engineering, IEEE-CASE 2005
國家/地區Canada
城市Edmonton
期間05-08-0105-08-02

All Science Journal Classification (ASJC) codes

  • 工程 (全部)

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