Design, modelling, and characterization of display compatible pMUT device

C. H. Huang, H. Gao, G. B. Torri, S. Mao, Y. Jeong, D. Cheyns, V. Rochus, X. Rottenberg

研究成果: Conference contribution

2 引文 斯高帕斯(Scopus)

摘要

In this paper, the design, modeling, and characterization of a display compatible pMUT platform are presented. A FEM model is built using COMSOL Multiphysics for evaluating the frequency response, mechanical performance, acoustic pressure, and driving efficiency of our pMUT device across all vibration modes of circular plates. In parallel with it, a first mode analytical model has been developed including electrical, mechanical, and acoustic domains to provide fast estimation for future design. A laser Doppler vibrometer is used to measure the frequency response, displacement, velocity as well as mode shapes of pMUTs with different designs in air. The measured resonance frequency of first mode range from 121.5kHz to 1.1MHz with radius from 500μm to 120μm and fits the prediction of FEM and analytical models. A standard reference microphone is used to measure the acoustic pressure of pMUT inside its frequency range (<125 kHz). The measured acoustic pressure on transverse axis of a 500μm radius pMUT also fits the values from analytical model on acoustic domain.

原文English
主出版物標題2018 19th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2018
發行者Institute of Electrical and Electronics Engineers Inc.
頁面1-4
頁數4
ISBN(電子)9781538623596
DOIs
出版狀態Published - 2018 五月 30
事件19th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2018 - Toulouse, France
持續時間: 2018 四月 152018 四月 18

出版系列

名字2018 19th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2018

Other

Other19th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2018
國家France
城市Toulouse
期間18-04-1518-04-18

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Fluid Flow and Transfer Processes
  • Electrical and Electronic Engineering
  • Safety, Risk, Reliability and Quality
  • Modelling and Simulation
  • Mechanical Engineering

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  • 引用此

    Huang, C. H., Gao, H., Torri, G. B., Mao, S., Jeong, Y., Cheyns, D., Rochus, V., & Rottenberg, X. (2018). Design, modelling, and characterization of display compatible pMUT device. 於 2018 19th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2018 (頁 1-4). (2018 19th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2018). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/EuroSimE.2018.8369931