Design of a 0.6-V 0.2-mW CMOS MEMS accelerometer

Po Chang Wu, Bin Da Liu, Chih Yuan Yeh, Sheg Hsiang Tseng, Hann Huei Tsai, Ying Zong Juang

研究成果: Conference contribution

2 引文 斯高帕斯(Scopus)

摘要

This paper presents a low-voltage low-power monolithic complementary metal-oxide-semiconductor (CMOS) micro-electromechanical-system (MEMS) accelerometer design. This design utilizes low-voltage design techniques without using low-threshold devices or internal supply voltage boosting. The accelerometer, designed in the 0.18-μm CMOS MEMS process, contains the micro-mechanical structure, readout circuits, and a 16-bit delta-sigma analog-to-digital converter (ΔΣ ADC). It occupies an area of only 0.8 × 1 mm2 and draws 0.33 mA of current from a 0.6-V supply. The simulated sensitivity is 3000 LSB/g and the nonlinearity is 0.78% within the ±6 g sensing range.

原文English
主出版物標題2015 IEEE International Conference on Consumer Electronics - Taiwan, ICCE-TW 2015
發行者Institute of Electrical and Electronics Engineers Inc.
頁面444-445
頁數2
ISBN(電子)9781479987443
DOIs
出版狀態Published - 2015 八月 20
事件2nd IEEE International Conference on Consumer Electronics - Taiwan, ICCE-TW 2015 - Taipei, Taiwan
持續時間: 2015 六月 62015 六月 8

出版系列

名字2015 IEEE International Conference on Consumer Electronics - Taiwan, ICCE-TW 2015

Other

Other2nd IEEE International Conference on Consumer Electronics - Taiwan, ICCE-TW 2015
國家/地區Taiwan
城市Taipei
期間15-06-0615-06-08

All Science Journal Classification (ASJC) codes

  • 人工智慧
  • 電腦網路與通信
  • 電氣與電子工程
  • 儀器
  • 媒體技術

指紋

深入研究「Design of a 0.6-V 0.2-mW CMOS MEMS accelerometer」主題。共同形成了獨特的指紋。

引用此